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Mass Flow Controller Product List and Ranking from 15 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Feb 04, 2026～Mar 03, 2026
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Feb 04, 2026～Mar 03, 2026
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. ジャパンコントロールス 「Japan Controls Co. Ltd.」 東京本社 Tokyo//Trading company/Wholesale
  3. Fujikin Incorporated Tokyo//Machine elements and parts
  4. 4 日本スターテクノ Ibaraki//Industrial Electrical Equipment
  5. 5 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
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Mass Flow Controller Product ranking

Last Updated： Aggregation Period:Feb 04, 2026～Mar 03, 2026
This ranking is based on the number of page views on our site.

  1. Realizing Precision Control in Energy Innovation <Application Case Introduction> ITWジャパン
  2. Mass flow controller, Alicat Corporation ジャパンコントロールス 「Japan Controls Co. Ltd.」 東京本社
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 4 System [Flow Control Device] FCS Thermal Series Fujikin Incorporated

Mass Flow Controller Product List

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Low-cost mass flow controller MC-10RC series

Low-cost mass flow controller MC-10RC series

A mass flow controller developed for analysis devices and various film deposition equipment, which is low-cost yet equipped with basic performance. It contributes to the improvement of semiconductor manufacturing costs.

The MC-10 series mass flow controller for gases is a low-cost model that can contribute to improving semiconductor manufacturing costs through short delivery times. It achieves low pricing by utilizing solenoid actuators and rubber seals. 【Features】 - Achieves low pricing by adopting rubber seals - Guarantees flow accuracy of ±1.0% F.S. - Supports a wide flow range - With the optional variable range function, it can accommodate multiple specifications with a single unit (gas type, F.S., and flow can be changed) - Stable operation even in environments with high-frequency noise and direct current magnetic fields, thanks to the use of a metal case and various filters *For other functions and details, please download the PDF.

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MODEL 5100 SERIES

MODEL 5100 SERIES

Dead volume reduction! Metal seal mass flow controller with a maximum flow rate of 1 SCCM to 20 SLM.

The "MODEL 5100 SERIES" is a metal-sealed mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume with a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter
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MODEL HFC-303 SERIES

MODEL HFC-303 SERIES

Introducing a mass flow controller that supports large flow rates up to F.S. 1000 SLM in N2 conversion!

We would like to introduce our high-flow mass flow controller, 'MODEL HFC-303 SERIES'. It supports high flow rates up to F.S. 1000SLM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc. (gases), with a maximum flow rate ranging from 100 to 1000SLM (gases). Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal wire sensor ■ Valve Type: Proportional solenoid + Pneumatic two-stage valve (closed when not energized) ■ Accuracy: ±1% F.S. (at 25°C) ■ Allowable Ambient Temperature: 5 to 45°C ■ Electrical Connection: D-sub 15 pin ■ Weight: Approximately 2400g *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter
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Fujikin Inc. "Mass Flow Controller"

Fujikin Inc. "Mass Flow Controller"

Fujikin's FCS always leads in flow (fluid) control technology!

The Fujikin FCS series is a "gas flow control device" that can be used in various industries. The FCS series offers two different product lineups with distinct control methods: the FCS-Pressure (pressure control method) series and the FCS-Thermal (thermal flow sensor control method) series.

  • Flow Control
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High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds.

High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds.

High-speed response within 0.3 seconds! For devices with frequent changes in set flow rate! Wide pressure range support (0.01 to 1.0 MPa).

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications that set them apart from competitors, designed for industries requiring diverse specifications, unlike those for the semiconductor industry. In addition to response speed: 【Bürkert's industrial mass flow controllers feature】 ● High pressure compatibility → Up to 1.0 MPa ● Minimum required differential pressure → 10 kPa is sufficient ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves 【Additionally, as IoT generation mass flow controllers】 ● Compatible with various communication standards EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET

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  • Flow Control
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Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.

Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.

Mass flow controller (MFC) compatible with a wide range of operating pressures. It enables high-speed response within 0.3 seconds. It can also control large flow rates!

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications tailored to different industries, setting them apart from competitors with unique features. Beyond pressure range, Bürkert's industrial mass flow controllers offer: ● Rangeability → High precision of 1:100 ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves Additionally, as IoT generation mass flow controllers, they support various communication standards: EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET.

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  • Flow Control
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ALICAT mass flow controller (low pressure loss type) delivery time 4 weeks

ALICAT mass flow controller (low pressure loss type) delivery time 4 weeks

A mass flow controller that measures with a very small differential pressure, has very low pressure loss, and is ideal for use in low-pressure environments. Current delivery time is approximately 4 weeks.

The "MCW/MCRW series" is a mass flow controller manufactured by ALICAT, ideal for environments where low pressure is used, as it can measure with very small differential pressure, resulting in minimal pressure loss. It achieves fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer the "MCS/MCRS series," which supports 128 types of gases, including corrosive gases and refrigerants. 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 1000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments
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ALICAT Mass Flow Controller MCV Series (for Vacuum)

ALICAT Mass Flow Controller MCV Series (for Vacuum)

ALICAT's mass flow controller with MCV/MCVS series (equipped with a vacuum shut-off valve).

The "MCV/MCVS series" is a mass flow controller manufactured by ALICAT, equipped with a shut-off valve for vacuum applications. It achieves a fast response through a laminar flow method (differential pressure type). It is equipped with a highly accurate differential pressure sensor to measure flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Available from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

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Mass Flow Controller Trouble Case Collection

Mass Flow Controller Trouble Case Collection

Examples of troubles such as valve clogging in mass flow controllers are published!

The "Mass Flow Controller Trouble Case Collection" is a compilation of various troubles related to mass flow controllers, including incidents, causes, and responses. [Included Cases] ■ Valve clogging in mass flow controllers ■ Oil contamination in mass flow ■ Valve malfunction in mass flow ■ Mass flow controller not producing flow ■ Difficulty in mass flow, among others For more details, please refer to the catalog or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Calibration and repair
  • Mass Flow Controller

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Mass flow controller, Alicat Corporation

Mass flow controller, Alicat Corporation

Standard features include a 100ms control response, high flow accuracy of ±(0.8% RD + 0.2% FS), analog output, and RS-232C communication.

★ Achieves fast response with the laminar flow method (differential pressure type). ★ Quickly follows flow rate changes. You can obtain the desired flow rate in a short time due to high-speed control response. ★ Flow rate settings can be made not only through front switch operation but also via analog input and RS-232C communication. ★ Standard equipped with mass flow rate 0-5VDC output. Options for 0-10VDC, 1-5VDC, and 4-20mADC are also available. Additionally, a second analog output can be added. ★ A wide range of models is available, from a small 0.5SCCM type to a large 5000SLPM type. ★ Capable of controlling 98 types of gases, including mixed gases, with a single unit. Gas selection can be easily performed using the front switch operation. For more details, please contact us or download the catalog.

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Mass Flow Controller 'SFC6000D-50slm'

Mass Flow Controller 'SFC6000D-50slm'

Samples available in a short lead time of 8 weeks! The supply chain is robust.

The "SFC6000D-50slm" is a mass flow controller that demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. It is a highly attractive product with an excellent price-performance ratio and a short delivery time of 8 weeks for obtaining samples. Additionally, its very small and lightweight design allows for optimization of device size and weight, which is a decisive advantage, especially for portable devices. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Excellent performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5300"

Mass Flow Controller "SFC5300"

Introducing MFC for OEM projects with strict cost requirements for mass production!

The "SFC5300" is a mass flow controller capable of measuring and controlling mass flow with excellent accuracy, long-term stability, and reproducibility. Despite its compact size, it can measure over a wide dynamic range, and the body is made of metal. Additionally, the product features a down-mount connection for fluid connections and offers two digital interfaces for connectivity. 【Specifications (partial)】 ■ Full-scale flow: 1, 2, 5, and 10 slm ■ Full-scale flow: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5330"

Mass Flow Controller "SFC5330"

Excellent accuracy, long-term stability, and reproducibility! Achieving outstanding performance.

The SFC5330 is a mass flow controller that achieves a dynamic measurement range while being compact in size. It is a smaller version of the SFC5300, making it suitable for cost-sensitive mass production OEM projects. Additionally, a valve-less type is also available, which has the same performance characteristics and similar applications, allowing for combination use. 【Specifications (partial)】 ■ Full-scale flow rate: 1, 2, and 5 slm ■ Full-scale flow rate: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5400"

Mass Flow Controller "SFC5400"

The main body is made of metal! A version without a valve is also available.

The "SFC5400" is a versatile mass flow controller that can connect to various interfaces and fluid connections. It can measure a maximum flow rate from 50 sccm to 200 slm, and the sensor signal is calibrated on the chip and directly converted into a temperature-compensated digital signal. Additionally, it can store multiple gas calibration data in one device, allowing you to check whether the operating gas calibration value matches the actual gas being measured. 【Specifications (partial)】 ■ Full-scale flow rates: 1, 2, 5, 10, 20, 50, and 100 slm ■ Full-scale flow rates: 50, 100, 200, and 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-2slm"

Mass Flow Controller "SFC5500-2slm"

Utilizing CMOSens MEMS technology! Available as standard products suitable for a wide range of applications.

The "SFC5500-2slm" is a mass flow controller that does not drift and does not require recalibration in the market. It combines multiple gas calibrations and interchangeable fittings, making it available as a standard product suitable for a wide range of applications. Additionally, it is suitable for a variety of environments in medical, analytical, and industrial settings, and you can choose from standard pre-set variations. 【Specifications (partial)】 ■ Full-scale flow: 2 slm ■ Full-scale flow: 2000 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 8 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-0.5slm'

Mass Flow Controller 'SFC5500-0.5slm'

A culmination of our 20 years of achievements in the precise control of gas flow!

The "SFC5500-0.5slm" is a mass flow controller that combines multiple gas calibrations and interchangeable fittings. This product is based on the microthermal measurement principle and utilizes our proven CMOSens MEMS technology. Additionally, unlike other products on the market, it does not drift and does not require recalibration in the market. 【Specifications (partial)】 ■ Full scale flow rate: 0.5slm ■ Full scale flow rate: 500sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-200slm"

Mass Flow Controller "SFC5500-200slm"

Utilizing CMOSens MEMS technology! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-200slm" is a mass flow controller that can accommodate multiple flow ranges in a single product. It can be obtained as a standard product suitable for a wide range of applications by combining multiple gas calibrations and interchangeable fittings. Additionally, it does not drift and does not require recalibration in the market. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow: 200slm ■ Full-scale flow: 200000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, and N2 flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "1000 Series"

Mass Flow Controller "1000 Series"

Suppresses overshoot at startup! High-performance gas flow controller at a low price.

The "1000 Series" is a high-performance gas flow controller that specializes in the basic functions of mass flow controllers, designed as an analog low-cost model. It can be used in a wide range of fields such as various analyses, film formation, physical and chemical experiments, and manufacturing applications. Additionally, we offer a dedicated power supply "PA01" with a simple design that only includes flow rate setting and display, making it easy to operate. 【Features】 ■ Low cost ■ Compact size ■ Suppresses overshoot at startup ■ Valve type: Normally open ■ Flow control range: 5–100% F.S. *For more details, please refer to the PDF materials or feel free to contact us.

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Mass Flow Controller/ Meter "5850E Series"

Mass Flow Controller/ Meter "5850E Series"

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
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Mass Flow Controller/ Meter "SLAMf Series"

Mass Flow Controller/ Meter "SLAMf Series"

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

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Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

Thin films, coatings, and surface treatments cover a wide range of industries and applications!

Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of plate glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, pressure measurement, and control devices cover PVD and CVD process applications. Additionally, our products are suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ High reproducibility and precision gas supply ■ Excellent quality, accurate thickness, and uniform film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield *For more details, please refer to the PDF document or feel free to contact us.

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High-performance mass flow controller MC-3000L series

High-performance mass flow controller MC-3000L series

This is a high-performance digital mass flow controller that employs our proprietary self-temperature compensation method (patented in the U.S. and Japan).

This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.

  • Piping Materials
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MODEL 8700 SERIES

MODEL 8700 SERIES

Integrated display type with various functions available! Introducing mass flow controllers/meters.

The "MODEL 8700 SERIES" is a mass flow controller/meter with a display that accommodates a wide range of flow rates. Various functions (instantaneous/integrated flow display, alarm settings) are available. The target fluids include gases such as N2, Air, H2, He, Ar, O2, and CO2. Additionally, it features RS485 communication capabilities and analog input/output of 0-5VDC (which can be changed to 4-20mA). 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM when converted to N2) ■ Analog input/output can be changed via the display (0-5VDC at the time of shipment) *For more details, please refer to the PDF document or feel free to contact us.

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MODEL 3660 SERIES

MODEL 3660 SERIES

Standard mass flow controller compatible with a wide flow range for N2, Air, H2, He, and others!

We would like to introduce our standard mass flow controller, the 'MODEL 3660 SERIES'. It supports a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 10 SCCM to 100 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM, converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter
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MODEL 3200 SERIES

MODEL 3200 SERIES

Reduction of dead volume! Introducing a high-grade mass flow controller with an accuracy of ±1% F.S.

The "MODEL 3200 SERIES" is a high-grade mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume through a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter
  • Mass Flow Controller

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Mass Flow Controller MODEL 8700/3660 SERIES

Mass Flow Controller MODEL 8700/3660 SERIES

It is less affected by temperature and pressure, allowing for high-precision flow measurement and control! Gases such as N2, Air, H2, He, and Ar are the targets.

We would like to introduce our mass flow controllers, the 'MODEL 8700/3660 SERIES'. The mass flow controller/indicator "MODEL 8700 SERIES" features analog input/output of 0-5VDC (which can be changed to 4-20mA) and offers various functions such as instantaneous/integrated flow display and alarm settings. The standard mass flow controller "MODEL 3660 SERIES" accommodates a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, equivalent to N2. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM equivalent to N2) ■ Analog input/output can be changed via the display (MODEL 8700 SERIES) *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments
  • Mass Flow Controller

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System [Flow Control Device] FCS Thermal Series

System [Flow Control Device] FCS Thermal Series

This is a flow control device that adopts a thermal flow sensor control method.

Achieved further total cost reduction and shortened lead time with a digital interface-equipped mass flow controller. 【Features】 ○ High precision Flow accuracy of ±1% ○ High-performance sensor Adoption of low-temperature flow sensors, achieving optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve with reduced gas contact area and prevention of particle generation Adoption of high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.

  • Flow Control
  • Mass Flow Controller

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System [Flow Control Device] FCS Pressure Series

System [Flow Control Device] FCS Pressure Series

This is a flow control device that adopts a pressure control method for ultra-high purity applications.

A flow control system that enables high-precision flow control, which cannot be achieved with conventional mass flow controllers, by controlling pressure. 【Features】 ○ Simple and dead space-free structure ○ Excellent pressure fluctuation characteristics Since the output value does not fluctuate even when the upstream pressure varies, it can be installed on the upstream side. Additionally, it allows for the elimination of regulators from the gas system, achieving both cost reduction and miniaturization of the gas system. ○ Adoption of flow factor Compatible with various types of gases ○ Excellent accuracy ○ Equipped with flow self-diagnosis function ○ Quick response ○ Mount position free ○ Supports device network communication ● For other functions and details, please download the catalog.

  • Flow Control
  • Mass Flow Controller

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