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Mass Flow Controller Product List and Ranking from 17 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. ＩＢＳ Osaka//Other manufacturing
  4. 4 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
  5. 5 センシリオン Kanagawa//Electronic Components and Semiconductors
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Mass Flow Controller Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Mass Flow Controller/ Meter "SLAMf Series" ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. 4 System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 Mass Flow Controller "Aera FC-R7700 Series" ＩＢＳ

Mass Flow Controller Product List

1～15 item / All 60 items

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Low-cost mass flow controller MC-10RC series

Low-cost mass flow controller MC-10RC series

A mass flow controller developed for analysis devices and various film deposition equipment, which is low-cost yet equipped with basic performance. It contributes to the improvement of semiconductor manufacturing costs.

The MC-10 series mass flow controller for gases is a low-cost model that can contribute to improving semiconductor manufacturing costs through short delivery times. It achieves low pricing by utilizing solenoid actuators and rubber seals. 【Features】 - Achieves low pricing by adopting rubber seals - Guarantees flow accuracy of ±1.0% F.S. - Supports a wide flow range - With the optional variable range function, it can accommodate multiple specifications with a single unit (gas type, F.S., and flow can be changed) - Stable operation even in environments with high-frequency noise and direct current magnetic fields, thanks to the use of a metal case and various filters *For other functions and details, please download the PDF.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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MODEL 5100 SERIES

MODEL 5100 SERIES

Dead volume reduction! Metal seal mass flow controller with a maximum flow rate of 1 SCCM to 20 SLM.

The "MODEL 5100 SERIES" is a metal-sealed mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume with a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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MODEL HFC-303 SERIES

MODEL HFC-303 SERIES

Introducing a mass flow controller that supports large flow rates up to F.S. 1000 SLM in N2 conversion!

We would like to introduce our high-flow mass flow controller, 'MODEL HFC-303 SERIES'. It supports high flow rates up to F.S. 1000SLM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc. (gases), with a maximum flow rate ranging from 100 to 1000SLM (gases). Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal wire sensor ■ Valve Type: Proportional solenoid + Pneumatic two-stage valve (closed when not energized) ■ Accuracy: ±1% F.S. (at 25°C) ■ Allowable Ambient Temperature: 5 to 45°C ■ Electrical Connection: D-sub 15 pin ■ Weight: Approximately 2400g *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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Fujikin Inc. "Mass Flow Controller"

Fujikin Inc. "Mass Flow Controller"

Fujikin's FCS always leads in flow (fluid) control technology!

The Fujikin FCS series is a "gas flow control device" that can be used in various industries. The FCS series offers two different product lineups with distinct control methods: the FCS-Pressure (pressure control method) series and the FCS-Thermal (thermal flow sensor control method) series.

  • Flow Control

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High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds.

High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds.

High-speed response within 0.3 seconds! For devices with frequent changes in set flow rate! Wide pressure range support (0.01 to 1.0 MPa).

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications that set them apart from competitors, designed for industries requiring diverse specifications, unlike those for the semiconductor industry. In addition to response speed: 【Bürkert's industrial mass flow controllers feature】 ● High pressure compatibility → Up to 1.0 MPa ● Minimum required differential pressure → 10 kPa is sufficient ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves 【Additionally, as IoT generation mass flow controllers】 ● Compatible with various communication standards EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET

  • app.jpg
  • EDIP-graphical-programming_full_detail.jpg
  • 874X.jpg
  • Flow Control

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Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.

Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.

Mass flow controller (MFC) compatible with a wide range of operating pressures. It enables high-speed response within 0.3 seconds. It can also control large flow rates!

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications tailored to different industries, setting them apart from competitors with unique features. Beyond pressure range, Bürkert's industrial mass flow controllers offer: ● Rangeability → High precision of 1:100 ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves Additionally, as IoT generation mass flow controllers, they support various communication standards: EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET.

  • app.jpg
  • EDIP-graphical-programming_full_detail.jpg
  • 874X.jpg
  • Flow Control

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ALICAT mass flow controller (low pressure loss type) delivery time 4 weeks

ALICAT mass flow controller (low pressure loss type) delivery time 4 weeks

A mass flow controller that measures with a very small differential pressure, has very low pressure loss, and is ideal for use in low-pressure environments. Current delivery time is approximately 4 weeks.

The "MCW/MCRW series" is a mass flow controller manufactured by ALICAT, ideal for environments where low pressure is used, as it can measure with very small differential pressure, resulting in minimal pressure loss. It achieves fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer the "MCS/MCRS series," which supports 128 types of gases, including corrosive gases and refrigerants. 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 1000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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ALICAT Mass Flow Controller MCV Series (for Vacuum)

ALICAT Mass Flow Controller MCV Series (for Vacuum)

ALICAT's mass flow controller with MCV/MCVS series (equipped with a vacuum shut-off valve).

The "MCV/MCVS series" is a mass flow controller manufactured by ALICAT, equipped with a shut-off valve for vacuum applications. It achieves a fast response through a laminar flow method (differential pressure type). It is equipped with a highly accurate differential pressure sensor to measure flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Available from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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Mass Flow Controller "Aera FC-R7700 Series"

Mass Flow Controller "Aera FC-R7700 Series"

Standard connectors and dimensions secured! Economical high-precision rubber seal model.

The "Aera FC-R7700 Series" is a mass flow controller that performs well in various applications in the field. It demonstrates its capabilities in high-precision flow control and improves cost-effectiveness by adopting rubber seals. Additionally, it features a fast response time, stabilizing flow in less than 2 seconds after setting the value. 【Features】 ■ Elastomer (rubber) seals ■ Connections compliant with VCR, VCO, and Swagelok standards ■ Full-scale flow range from 10 sccm to 200 slm ■ Normally closed or normally open solenoid control valves ■ External leak rate of less than 1.0x10-7 Pa·m3/sec (He) *For more details, please refer to the PDF document or feel free to contact us.

  • valve

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Mass Flow Controller "Aera PI-980"

Mass Flow Controller "Aera PI-980"

Next-generation PI technology! Mass flow controller compatible with IGS method that is less affected by pressure.

The "Aera PI-980" is a pressure-sensitive type mass flow controller developed in anticipation of the growing demand for next-generation semiconductor manufacturing processes. With excellent flow stability, it enhances process reproducibility between chambers and improves production yield. Additionally, it has been verified for accuracy with real gases and supports multi-gas and multi-range applications. 【Features】 - Capable of pressure-insensitive control (less affected by pressure) - High measurement accuracy and reproducibility - Compatible with IGS method - Verified for accuracy with real gases, supports multi-gas and multi-range - Programmable in the field *For more details, please refer to the PDF materials or feel free to contact us.

  • valve

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Mass Flow Controller Trouble Case Collection

Mass Flow Controller Trouble Case Collection

Examples of troubles such as valve clogging in mass flow controllers are published!

The "Mass Flow Controller Trouble Case Collection" is a compilation of various troubles related to mass flow controllers, including incidents, causes, and responses. [Included Cases] ■ Valve clogging in mass flow controllers ■ Oil contamination in mass flow ■ Valve malfunction in mass flow ■ Mass flow controller not producing flow ■ Difficulty in mass flow, among others For more details, please refer to the catalog or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Calibration and repair

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Mass flow controller, Alicat Corporation

Mass flow controller, Alicat Corporation

Standard features include a 100ms control response, high flow accuracy of ±(0.8% RD + 0.2% FS), analog output, and RS-232C communication.

★ Achieves fast response with the laminar flow method (differential pressure type). ★ Quickly follows flow rate changes. You can obtain the desired flow rate in a short time due to high-speed control response. ★ Flow rate settings can be made not only through front switch operation but also via analog input and RS-232C communication. ★ Standard equipped with mass flow rate 0-5VDC output. Options for 0-10VDC, 1-5VDC, and 4-20mADC are also available. Additionally, a second analog output can be added. ★ A wide range of models is available, from a small 0.5SCCM type to a large 5000SLPM type. ★ Capable of controlling 98 types of gases, including mixed gases, with a single unit. Gas selection can be easily performed using the front switch operation. For more details, please contact us or download the catalog.

  • mfc1.png
  • Flow Control
  • Other process controls

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Mass Flow Controller 'SFC6000D-50slm'

Mass Flow Controller 'SFC6000D-50slm'

Samples available in a short lead time of 8 weeks! The supply chain is robust.

The "SFC6000D-50slm" is a mass flow controller that demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. It is a highly attractive product with an excellent price-performance ratio and a short delivery time of 8 weeks for obtaining samples. Additionally, its very small and lightweight design allows for optimization of device size and weight, which is a decisive advantage, especially for portable devices. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Excellent performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

  • Flow Control

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Mass Flow Controller "SFC5300"

Mass Flow Controller "SFC5300"

Introducing MFC for OEM projects with strict cost requirements for mass production!

The "SFC5300" is a mass flow controller capable of measuring and controlling mass flow with excellent accuracy, long-term stability, and reproducibility. Despite its compact size, it can measure over a wide dynamic range, and the body is made of metal. Additionally, the product features a down-mount connection for fluid connections and offers two digital interfaces for connectivity. 【Specifications (partial)】 ■ Full-scale flow: 1, 2, 5, and 10 slm ■ Full-scale flow: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

  • controller

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Mass Flow Controller "SFC5330"

Mass Flow Controller "SFC5330"

Excellent accuracy, long-term stability, and reproducibility! Achieving outstanding performance.

The SFC5330 is a mass flow controller that achieves a dynamic measurement range while being compact in size. It is a smaller version of the SFC5300, making it suitable for cost-sensitive mass production OEM projects. Additionally, a valve-less type is also available, which has the same performance characteristics and similar applications, allowing for combination use. 【Specifications (partial)】 ■ Full-scale flow rate: 1, 2, and 5 slm ■ Full-scale flow rate: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

  • controller

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